Behind the precise operation of high-end lithography machines, the silicon carbide water-cooled framework plays an indispensable role in temperature control and protection. The lithography machine uses extreme ultraviolet light (EUV) and other light sources for lithography. During the process, optical components, workbenches, and other parts generate a large amount of heat due to energy input, and the silicon carbide water-cooled skeleton is the core component to address this issue.
展开剩余79%Its working principle is based on heat conduction and circulating water cooling technology. When the lithography machine is running, the heat generated is quickly transferred to the silicon carbide water-cooled skeleton. The circulating coolant in the water-cooled channels inside the skeleton takes away the heat, ensuring stable temperature of key components and maintaining high-precision operation of the lithography machine. If the heat accumulation cannot be dissipated in time, the thermal expansion of optical components and the deformation of the worktable will cause the offset of the lithography pattern, directly affecting the process accuracy and yield of the chip.
The excellent performance of silicon carbide material is the key to the effectiveness of water-cooled skeleton. Its ultra-high thermal conductivity can reach 490-600W/(m · K), which is 3-5 times that of copper. It can quickly dissipate heat and has a low coefficient of thermal expansion. It can also maintain dimensional stability under severe temperature changes, ensuring that the positioning accuracy of components such as lithography machine workbenches is not affected. At the same time, silicon carbide has high hardness and strong chemical stability, which can effectively resist corrosion and wear in the long-term erosion and complex environment of coolant, and prolong the service life of water-cooled skeleton.
However, the preparation of silicon carbide water-cooled skeleton faces many challenges. Its complex internal water-cooled channel structure requires high-precision processing technology and ensures the density and uniformity of silicon carbide material to ensure thermal conductivity efficiency and structural strength. In the future, with the innovation of processing technology and optimization of material performance, silicon carbide water-cooled skeleton will provide more solid support for the accuracy improvement of lithography machines, helping the semiconductor industry move towards higher process technology. Jundro Ceramics, as a manufacturer specializing in precision five axis processing of special ceramics and special glass, is committed to providing high-quality material solutions for semiconductor component manufacturing.
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